Force characterization and analysis of thin film actuators for untethered microdevices

F Ongaro, Q Jin, U Siciliani de Cumis, A Ghosh, A Denasi, D H Gracias, and S Misra, “Force characterization and analysis of thin film actuators for untethered microdevices”, AIP Advances, 9(5): 055011-1–055011-5, May 2019.

 


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